FOMOS Materials Co., Institute of Microelectronics Technology and High−Purity Materials of the Russian Academy of Sciences:

O. A. Buzanov

S. A. Sakharov

D. V. Roshchupkin

E. V. Emelin

Moscow State Technological University of Radio Engineering, Electronics and Automatics:

S. D. Lavrov

Results of application of a ferroelectric LiTaO₃ crystal in opto− and acoustoelectronics are presented. The large values of the piezoelectric constants in the LiTaO₃ crystal are favorable for designing bulk acoustic wave resonators. The possibility of direct electron beam repolarization of LiTaO₃ crystals was used for the fabrication of ferroelectric domain structures sizing from few nanometers to tenth micrometers. The regular domain structures in the LiTaO₃ crystal were used as an optical diffraction grating and for the generation of second−harmonic optical radiation.

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