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MODELING OF PROCESSES AND MATERIALS
ArticleName Modeling of diamond−like film formation. Part II: Synthesis from carbon С2−dimers
ArticleAuthor V. A. Tarala, B. M. Sinelnikov
ArticleAuthorData V. A. Tarala, South Research Center, Russian Academy of Sciencesand; B. M. Sinelnikov, State Educational Institution "VPO North Caucasus State Technical University".
Abstract

The results presented in this article are a model of the nucleation and growth of amorphous and crystalline diamond−like materials. This study deals with assessing the role of carbon C2−dimers in the structure formation of crystalline and amorphous diamond. The resulting model expressions show how changing the two most importanttechnological parameters (temperature and partial pressure of the C2−dimers) affect the structure of diamond−like carbon films.
keywords Simulation, amorphous and crystalline diamond−like materials, carbon dimers, film structure.
References

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