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MATERIALS SCIENCE AND TECHNOLOGY. DIELECTRICS
Название Study of spectral dependence of the absorption coefficient in undoped silicon−carbon films
Автор M. D. Malinkovich, Yu. N. Parkhomenko, M. L. Shupegin, A. P. Bliev, A. V. Gritsenko
Информация об авторе M. D. Malinkovich; Yu. N. Parkhomenko; M. L. Shupegin; A. P. Bliev, MISiS National Research and Technical University; A. V. Gritsenko, North Ossetia State University.
Реферат

The spectral dependence of the absorption coefficient has been studied in the 190 nm to 1.9 μm region for undoped silicon−carbon films synthesized from polyphenylmethylsiloxane (PPMS) silicon organic liquid by high−frequency deposition from PPMS vapor plasma. We show that the short−wave absorption region of the films is not monotonic and contains various types of electron transitions, probably including interband ones.

Ключевые слова Absorption coefficient, silicon−carbon films, polyphenylmethylsiloxane.
Библиографический список

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Language of full-text русский
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