Institute of Thermal Physics SB RAS
P. V. Antonov and V. S. Berdnikov
The melt hydrodynamics and the conjugate heat transfer was studied numerically at multisilicon ingot production by Bridgman−Stockbarger method in crucibles with various configuration of the bottom part. The non−stationary equations of convective heat transfer in area occupied by silicon melt and heat−conductivity equation for the solid silicon body and walls of the graphite crucible of regular cylindrical shape with flat or conical bottom were solved, considering the heat of phase transition. Processes of crystallization in modes of non−stationary heat conductivity and thermal gravitational convection were compared.
1. Vil'ke, K.−T. Vyrashchivanie kristallov / K.−T. Vil'ke − L. : Nedra, 1977. − 600 s.
2. Berdnikov, V. S. Chislennoe modelirovanie teplofizicheskikh protsessov pri vyrashchivanii kristallov mul'tikremniya metodom Bridzhmena−Stokbargera / V. S. Berdnikov, M. V. Filippova, B. A. Krasin, A. I. Nepomnyashchikh // Teplofizika i aeromekhanika. − 2006. − T. 13, № 2. − S. 275—293.
3. Anfimov, I. M. Odnorodnost' raspredeleniya udel'nogo elektrosoprotivleniya v monokristallicheskom kremnii, vyrashchennom metodom Chokhral'skogo / I. M. Anfimov, V. S. Berdnikov, E. A. Vygovskaya, S. P. Kobeleva, A. A. Smirnov, Yu. V. Osipov, O. V. Toropova, V. N. Murashev // Izv. vuzov. Materialy elektron. tekhniki. − 2007. − № 4. − S. 40—44.
4. Mühlbauer, A. Electrodynamic convection in silicon floating zones / A. Mühlbauer, W. Erdmann, W. Keller // J. Cryst. Growth. − 1983. − V. 64. − P. 529—545.
5. Yaws, C. L. Semiconductor industry silicon: physical and thermodynamic properties / C. L. Yaws, L. L. Dickens, R. Lutwak, G. Hsu // Solid State Technol. − 1981. − V. 24, N 1. − P. 87—92.
6. Drits, M. E. Svoystva elementov: Cprav. / M. E. Drits, P. B. Budberg, N. T. Kuznetsov. − M. : Metallurgiya, 1997. − Kn. 2. 448 s.
7. Stankus, S. V. Termicheskie svoystva germaniya i kremniya v kondensirovannom sostoyanii / S. V. Stankus, R. A. Khayrulin, P. V. Tyagel'skiy // Teplofizika vysokikh temperatur. − 1999. − T. 37, № 4. − S. 559—564.
8. Raskatov, V. M. Mashinostroitel'nye materialy: Kratkiy spravochnik / V. M. Raskatov, V. S. Chuenkov, N. F. Bessonova, D. A. Veys. − M. : Mashinostroenie, 1980. − 512 s.
9. Vargaftik, N. B. Spravochnik po teplofizicheskim svoystvam gazov i zhidkostey / N. B. Vargaftik − M. : Nauka, 1972. − 544 s.