National Research University «MISiS»

D. A. Kiselev, R. N. Zhukov, A. S. Bykov, M. D. Malinkovich, Yu. N. Parkhomenko, E. A. Vygovskaya

In this work, an Atomic Force Microscope in the so−called Piezoresponse mode and Kelvin mode is used to image the grains, ferroelectric domains and surface potential in lithium niobate thin films. A RF magnetron sputter system was used to deposit LiNbO₃ thin films on (100)−oriented Si substrates with SiO₂ layer. Using the electric field from a biased conducting AFM tip, we show that possible to form and subsequently to visualize ferroelectric state. Also, we report surface charge retention on ferroelectric thin films by Kelvin probe microscope in comparison with the piezoresponse signal.

1. Feigelson, R. S. Epitaxial growth of lithium niobate thin films by the solid source MOCVD method / R. S. Feigelson // J. Cryst. Growth. − 1996. − V. 166. − P. 1.
2. Tsukada, I. Pulsed−laser deposition of LiNbO₃ in low gas pressure using pure ozone / I. Tsukada, S. Higuchi. // Jap. J. Appl. Phys. − 2004. − V. 43. − P. 5307.
3. Lee, S. Y. Reduced optical losses in MOCVD grown lithium niobate thin films on sapphire by controlling nucleation density / S. Y. Lee, R. S. Feigelson // J. Cryst. Growth. − 1998. − V. 186. − P. 594.
4. Kiselev, D. A. P'ezo− i piroelektricheskie petli gisterezisa unipolyarnykh tonkikh plenok tsirkonata−titanata svintsa / D. A. Kiselev, A. L. Kholkin, A. A. Bogomolov, O. N. Sergeeva, E. Yu. Kaptelov, I. P. Pronin // PZhTF. − 2008. − T. 34. − S. 28.

5. Gautier, B. Nanoscale observation of the distribution of the polarization orientation of ferroelectric domains in lithium niobate thin films / B. Gautier, V. Bornand // Thin Solid Films − 2006. − V. 515. − P. 1592.
6. Bornand, V. Growth and nanoscale ferroelectric investigation of radiofrequency−sputtered LiNbO₃ thin films / V. Bornand, B. Gautier, Ph. Papet // Mater. Chem. and Phys. − 2004. − V. 86. − P. 340.
7. Zhukov, R. N. Rasprostranenie polyarizatsii segnetoelektricheskikh zeren v elektricheski izolirovannykh plenkakh niobata litiya / R. N. Zhukov, D. A. Kiselev, M. D. Malinkovich, Yu. N. Parkhomenko, E. A. Vygovskaya, O. V. Toropova // Izv. vuzov. Materialy elektron. tekhniki − 2011. − № 4. − S. 12—16.
8. Bornand, V. Growth technologies and studies of ferroelectric thin films−application to LiTaO₃ and LiNbO₃ materials / V. Bornand, Ph. Papet // Ferroelectrics. − 2003. − V. 288. − P. 187.
9. Jonscher, A. K. Universal relaxation law / A. K. Jonscher. − London : Chelsea Dielectric Press, 1996. − 415 p.
10. Hong, S. Principle of ferroelectric domain imaging using atomic force microscope / S. Hong, J. Woo, H. Shin, J. U. Jeon, Y. E. Pak, E. L. Colla, N. Setter, E. Kim, K. No // J. Appl. Phys. − 2001. − V. 89. − P. 1377.
11. Lim, D. G. Characteristics of LiNbO₃ memory capacitors fabricated using a low thermal budget process / D. G. Lim, B. S. Jang, S. I. Moon, C. Y. Won, J. Yi // Solid−State Electr. − 2001. − V. 45. − P. 1159.
12. Gautier, B. Nanoscale study of the ferroelectric properties of SrBi₂Nb₂O₉ thin films grown by pulsed laser deposition on epitaxial Pt electrodes using atomic force microscope / B. Gautier, J.−R. Duclereb, M. Guilloux−Viry // Appl. Surf. Sci. − 2003. − V. 217. − P. 108.