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| PHYSICAL CHARACTERISTICS AND THEIR STUDY | |
| ArticleName | Comparative characteristics of single− and double–layer pressure transducers on SOS structures |
| ArticleAuthor | A. A. Ustinov, Yu. S. Nagornov, A. I. Kozlov |
| ArticleAuthorData | JSC MIDAUS A. A. Ustinov, A. I. Kozlov
Ul’yanovsk State University Yu. S. Nagornov |
| Abstract | Comparative characteristics of semiconductor pressure transducers with Silicon on Sapphire (SOS) structures are presented in the present work. Two kinds of pressure transducers with a single−layer diaphragm on the ceramic substrate and with a double−layer diaphragm (sapphire and metal) have been investigated. Single−layer pressure transducers have better characteristics compared with double−layer ones but their application is limited to a narrower pressure measurement range. |
| keywords | Pressure sensor, pressure transducer, silicon−on−sapphire structure (SOS) |
| Language of full-text | russian |
| Full content | Buy |
