PHYSICAL CHARACTERISTICS AND THEIR STUDY
Название
Comparative characteristics of single− and double–layer pressure transducers on SOS structures
Авторы
A. A. Ustinov, Yu. S. Nagornov, A. I. Kozlov
Информация об авторах
JSC MIDAUS
A. A. Ustinov, A. I. Kozlov
Ul’yanovsk State University
Yu. S. Nagornov
Реферат
Comparative characteristics of semiconductor pressure transducers with Silicon on Sapphire (SOS) structures are presented in the present work. Two kinds of pressure transducers with a single−layer diaphragm on the ceramic substrate and with a double−layer diaphragm (sapphire and metal) have been investigated. Single−layer pressure transducers have better characteristics compared with double−layer ones but their application is limited to a narrower pressure measurement range.
Ключевые слова
Pressure sensor, pressure transducer, silicon−on−sapphire structure (SOS)
Language of full-text
русский
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